Pull-in extension of MEMS electrostatic microactuators using an active control method

Metadata only

Author

Date

2005

Type

Conference Paper

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

Book title

Proceedings of the 3rd International Conference on Microchannels and Minichannels

Pages / Article No.

273 - 279

Publisher

American Society of Mechanical Engineers

Event

3rd International Conference on Microchannels and Minichannels, Toronto, Canada, June 13-15, 2005

Organisational unit

03627 - Nelson, Bradley J. / Nelson, Bradley J.

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ETH Bibliography

yes

Altmetrics

Research Collection