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dc.contributor.author
Langner, A.
dc.contributor.author
Päivänranta, B.
dc.contributor.author
Terhalle, B.
dc.contributor.author
Ekinci, Y.
dc.date.accessioned
2017-06-09T20:07:14Z
dc.date.available
2017-06-09T20:07:14Z
dc.date.issued
2012-03
dc.identifier.other
10.1088/0957-4484/23/10/105303
dc.identifier.uri
http://hdl.handle.net/20.500.11850/47303
dc.language.iso
en
dc.publisher
Institute of Physics
dc.title
Fabrication of quasiperiodic nanostructures with EUV interference lithography
dc.type
Journal Article
ethz.journal.title
Nanotechnology
ethz.journal.volume
23
ethz.journal.issue
10
ethz.pages.start
105303
ethz.size
6 p.
ethz.notes
Received 2 November 2011.
ethz.identifier.wos
ethz.identifier.nebis
000552937
ethz.publication.place
Bristol
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02645 - Institut für Metallforschung / Institute of Metals Research::03661 - Löffler, Jörg F. / Löffler, Jörg F.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02645 - Institut für Metallforschung / Institute of Metals Research::03661 - Löffler, Jörg F. / Löffler, Jörg F.
ethz.date.deposited
2017-06-09T20:08:39Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f11004a944771
ethz.ecitpid
pub:77855
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T20:42:06Z
ethz.rosetta.lastUpdated
2020-02-14T09:40:36Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Fabrication%20of%20quasiperiodic%20nanostructures%20with%20EUV%20interference%20lithography&rft.jtitle=Nanotechnology&rft.date=2012-03&rft.volume=23&rft.issue=10&rft.spage=105303&rft.au=Langner,%20A.&P%C3%A4iv%C3%A4nranta,%20B.&Terhalle,%20B.&Ekinci,%20Y.&rft.genre=article&
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