UV absorbance of titanium oxide-like films by plasma assisted deposition from mixtures of oxygen and titanium-tetrakis-isopropoxide
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Date
2005Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedEditor
Book title
Papers based on presentations at the 17th International Symposium on Plasma Chemistry (ISPC 17)Journal / series
Pure and Applied ChemistryVolume
Publisher
International Union of Pure and Applied ChemistryEvent
Subject
Titanium oxide; Plasma assisted chemical vapour deposition (PACVD); UV absorption; XPSOrganisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
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ETH Bibliography
yes
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