UV absorbance of titanium oxide-like films by plasma assisted deposition from mixtures of oxygen and titanium-tetrakis-isopropoxide

Metadata only

Autor(in)

Datum

2005

Typ

Conference Paper

ETH Bibliographie

yes

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Publikationsstatus

published

Herausgeber(in)

Buchtitel

Papers based on presentations at the 17th International Symposium on Plasma Chemistry (ISPC 17)

Zeitschrift / Serie

Pure and Applied Chemistry

Band

78(6)

Verlag

International Union of Pure and Applied Chemistry

Konferenz

XVII International Symposium on Plasma Chemistry (ISPC17), Toronto, Canada, August 7 -12, 2005

Thema

Titanium oxide; Plasma assisted chemical vapour deposition (PACVD); UV absorption; XPS

Organisationseinheit

03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)

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ETH Bibliographie

yes

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Research Collection