UV absorbance of titanium oxide-like films by plasma assisted deposition from mixtures of oxygen and titanium-tetrakis-isopropoxide
dc.contributor.author
Sonnenfeld, A.
dc.contributor.author
Hauert, R.
dc.contributor.author
Rudolf von Rohr, Philipp
dc.contributor.editor
Mostaghimi, Javad
dc.date.accessioned
2019-10-31T15:54:01Z
dc.date.available
2017-06-09T20:25:20Z
dc.date.available
2019-10-31T15:54:01Z
dc.date.issued
2005
dc.identifier.uri
http://hdl.handle.net/20.500.11850/47680
dc.language.iso
en
en_US
dc.publisher
International Union of Pure and Applied Chemistry
en_US
dc.subject
Titanium oxide
en_US
dc.subject
Plasma assisted chemical vapour deposition (PACVD)
en_US
dc.subject
UV absorption
en_US
dc.subject
XPS
en_US
dc.title
UV absorbance of titanium oxide-like films by plasma assisted deposition from mixtures of oxygen and titanium-tetrakis-isopropoxide
en_US
dc.type
Conference Paper
ethz.book.title
Papers based on presentations at the 17th International Symposium on Plasma Chemistry (ISPC 17)
en_US
ethz.journal.title
Pure and Applied Chemistry
ethz.journal.volume
78
en_US
ethz.journal.issue
6
en_US
ethz.size
6 p.
en_US
ethz.event
XVII International Symposium on Plasma Chemistry (ISPC17)
en_US
ethz.event.location
Toronto, Canada
en_US
ethz.event.date
August 7 -12, 2005
en_US
ethz.identifier.nebis
005213966
ethz.publication.place
Resarch Triangle Park, NC
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-09T20:26:20Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f1952b9d73850
ethz.ecitpid
pub:78487
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-07-19T01:36:39Z
ethz.rosetta.lastUpdated
2019-10-31T15:54:18Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [35891]