Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers

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Author

Date

2004-06

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Applied Surface Science

Volume

231–232

Pages / Article No.

704 - 707

Publisher

Elsevier

Event

14th International Conference on Secondary Ion Mass Spectrometry (SIMS 14), San Diego, CA, USA, September 14-19, 2003

Subject

SIMS; RBS; SiGe; Relaxed buffer layers; Matrix effects; Depth profile

Notes

Available online 6 May 2004.

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ETH Bibliography

yes

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