Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C

Metadata only

Author

Date

2004-07

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

IEEE Journal of Solid-State Circuits

Volume

39(7)

Pages / Article No.

1202 - 1207

Publisher

IEEE

Subject

CMOS monolithic metal-oxide gas sensors; Material characterization; Microcalorimeters; Microhotplate; Temperature control

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

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ETH Bibliography

yes

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Research Collection