Efficient residual stress identification approach for MEMS using modal information
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Date
2016Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedBook title
Proceedings of Isma2016 International Conference on Noise and Vibration Engineering and Usd2016 International Conference on Uncertainty in Structural DynamicsPages / Article No.
Publisher
KU Leuven, Departement WerktuigkundeEvent
Organisational unit
03973 - Haller, George / Haller, George02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems
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ETH Bibliography
yes
Altmetrics