High-resolution nanopatterning by achromatic spatial frequency multiplication with electroplated grating structures

Thumbnail
Metadata only
Author
Wang, Li
Terhalle, Bernd
Hojeij, Mohamad
Guzenko, Vitaliy A.
Ekinci, Yasin
Show all
Date
2012-05
Type
    Journal Article
Publication status
published
External links
Journal / series
Journal of Vacuum Science & Technology B
Volume
30(3)
Pages / Article No.
031603
Publisher
American Institute of Physics
Organisational unit
03661 - Löffler, Jörg F. / Löffler, Jörg F.  
Notes
Published online 28 March 2012.
More
Show all metadata
Citations
Cited 20 times in Web of Science
ETH Bibliography
yes
Altmetrics