Tin Droplets for LPP EUV Sources

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Author
Rollinger, Bob
Bozinova, Luna
Gambino, Nadia
Abhari, Reza S.
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Date
2012-02
Type
    Conference Paper
Publication status
published
External links
Editor
Naulleau, Patrick P.
Book title
Extreme ultraviolet (EUV) lithography III : 13-16 February 2012, San Jose, California, United States
Journal / series
Proceedings of SPIE
Volume
8322
Pages / Article No.
83222P-1 - 83222P-9
Publisher
SPIE
Event
Conference on Extreme Ultraviolet (EUV) Lithography III, San Jose, CA, February 13-16, 2012
Subject
EUV source; Lithography; Droplets; Tin; Laser plasma; Experimental
Organisational unit
03548 - Abhari, Reza S. / Abhari, Reza S.  
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Citations
Cited 6 times in Web of Science
ETH Bibliography
yes
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