Tin Droplets for LPP EUV Sources

Metadata only

Author

Rollinger, Bob

Bozinova, Luna

Gambino, Nadia

Abhari, Reza S.

Date

2012-02

Type

Citations

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Publication status

published

External links

Editor

Naulleau, Patrick P.

Book title

Extreme ultraviolet (EUV) lithography III : 13-16 February 2012, San Jose, California, United States

Journal / series

Proceedings of SPIE

Volume

8322

Pages

83222P-1 - 83222P-9

Publisher

SPIE

Event

Conference on Extreme Ultraviolet (EUV) Lithography III, San Jose, CA, February 13-16, 2012

Subject

EUV source; Lithography; Droplets; Tin; Laser plasma; Experimental

Organisational unit

03548 - Abhari, Reza S.

Notes

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