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dc.contributor.author
Rollinger, Bob
dc.contributor.author
Bozinova, Luna
dc.contributor.author
Gambino, Nadia
dc.contributor.author
Abhari, Reza S.
dc.contributor.editor
Naulleau, Patrick P.
dc.date.accessioned
2017-06-10T01:41:22Z
dc.date.available
2017-06-10T01:41:22Z
dc.date.issued
2012-02
dc.identifier.isbn
978-0-8194-8978-4
dc.identifier.issn
0277-786X
dc.identifier.other
10.1117/12.916683
dc.identifier.uri
http://hdl.handle.net/20.500.11850/50380
dc.language.iso
en
dc.publisher
SPIE
dc.subject
EUV source
dc.subject
Lithography
dc.subject
Droplets
dc.subject
Tin
dc.subject
Laser plasma
dc.subject
Experimental
dc.title
Tin Droplets for LPP EUV Sources
dc.type
Conference Paper
ethz.book.title
Extreme ultraviolet (EUV) lithography III : 13-16 February 2012, San Jose, California, United States
ethz.journal.title
Proceedings of SPIE
ethz.journal.volume
8322
ethz.journal.abbreviated
Proc. SPIE Int. Soc. Opt. Eng.
ethz.pages.start
83222P-1
ethz.pages.end
83222P-9
ethz.size
9 p.
ethz.event
Conference on Extreme Ultraviolet (EUV) Lithography III
ethz.event.location
San Jose, CA
ethz.event.date
February 13-16, 2012
ethz.notes
.
ethz.identifier.wos
ethz.identifier.nebis
004705004
ethz.publication.place
Bellingham, Washington
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02627 - Institut für Energietechnik / Institute of Energy Technology::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02627 - Institut für Energietechnik / Institute of Energy Technology::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-10T01:43:06Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f51db9c822442
ethz.ecitpid
pub:82487
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T22:55:19Z
ethz.rosetta.lastUpdated
2018-10-01T17:17:32Z
ethz.rosetta.versionExported
true
ethz.COinS
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