A single-chip CMOS micro-hotplate array for hazardous-gas detection and material characterization

Abstract

A single-chip microsystem for the detection and discrimination of hazardous gases and solid-state material characterization is presented. The circuit features three micro-hotplates, and each requires mixed-signal circuitry. The microsystem is fabricated in industrial 0.8/spl mu/m CMOS technology with post-CMOS micromachining. The power efficiency of the micro-hotplate is 10/spl deg/C/mW and represents a 60% improvement.