A single-chip CMOS micro-hotplate array for hazardous-gas detection and material characterization
Abstract
A single-chip microsystem for the detection and discrimination of hazardous gases and solid-state material characterization is presented. The circuit features three micro-hotplates, and each requires mixed-signal circuitry. The microsystem is fabricated in industrial 0.8/spl mu/m CMOS technology with post-CMOS micromachining. The power efficiency of the micro-hotplate is 10/spl deg/C/mW and represents a 60% improvement. Show more
Publication status
publishedExternal links
Book title
2004 IEEE International Solid-State Circuits ConferenceJournal / series
Digest of Technical Papers / IEEE International Solid State Circuits ConferenceVolume
Pages / Article No.
Publisher
IEEEEvent
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
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