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dc.contributor.author
Paskaleva, A.
dc.contributor.author
Bauer, A.J.
dc.contributor.author
Lemberger, M.
dc.contributor.author
Zürcher, S.
dc.date.accessioned
2017-06-10T01:54:04Z
dc.date.available
2017-06-10T01:54:04Z
dc.date.issued
2004-05
dc.identifier.issn
0021-8979
dc.identifier.issn
1089-7550
dc.identifier.other
10.1063/1.1702101
dc.identifier.uri
http://hdl.handle.net/20.500.11850/50715
dc.language.iso
en
dc.publisher
American Institute of Physics
dc.subject
Hafnium compounds
dc.subject
Titanium compounds
dc.subject
Dielectric thin films
dc.subject
MOCVD
dc.subject
Permittivity
dc.subject
Electrical conductivity
dc.subject
Leakage currents
dc.subject
Stoichiometry
dc.title
Different current conduction mechanisms through thin high-k HfxTiySizO films due to the varying Hf to Ti ratio
dc.type
Journal Article
ethz.journal.title
Journal of Applied Physics
ethz.journal.volume
95
ethz.journal.issue
10
ethz.journal.abbreviated
J. Appl. Physi.
ethz.pages.start
5583
ethz.pages.end
5590
ethz.size
8 p.
ethz.notes
Received 16 December 2003, Accepted 16 February 2004.
ethz.identifier.wos
ethz.identifier.nebis
000037502
ethz.publication.place
Melville, NY
ethz.publication.status
published
ethz.date.deposited
2017-06-10T01:54:17Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f58f26ef75427
ethz.ecitpid
pub:82829
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-17T08:41:41Z
ethz.rosetta.lastUpdated
2021-02-14T08:56:54Z
ethz.rosetta.versionExported
true
ethz.COinS
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