Tuning Sensitivity and Selectivity of Complementary Metal Oxide Semiconductor-Based Capacitive Chemical Microsensors

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Author
Kummer, Adrian M.
Hierlemann, Andreas
Baltes, Henry
Date
2004
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Analytical chemistry
Volume
76(9)
Pages / Article No.
2470 - 2477
Publisher
American Chemical Society
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas  
Notes
Received for review 16 October 2003, Accepted 17 February 2004.
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Citations
Cited 55 times in Web of Science
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