Identification and open-loop tracking control of a piezoelectric tube, scanner for high-speed scanning-probe microscopy

Metadata only

Author

Date

2004-05

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

IEEE Transactions on Control Systems Technology

Volume

12(3)

Pages / Article No.

449 - 454

Publisher

IEEE

Subject

Atomic force microscopy; Fast scanning; Friction force; Piezoelectric transducers; Scanning probe; Tracking control

Organisational unit

03444 - Stemmer, Andreas (emeritus) / Stemmer, Andreas (emeritus)

Notes

Published online 4 May 2004.

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ETH Bibliography

yes

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