Identification and open-loop tracking control of a piezoelectric tube, scanner for high-speed scanning-probe microscopy

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Autor(in)
Schitter, G
Stemmer, A.
Datum
2004-05
Typ
    Journal Article
Publikationsstatus
published
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Zeitschrift / Serie
IEEE Transactions on Control Systems Technology
Band
12(3)
Seiten / Artikelnummer
449 - 454
Verlag
IEEE
Thema
Atomic force microscopy; Fast scanning; Friction force; Piezoelectric transducers; Scanning probe; Tracking control
Organisationseinheit
03444 - Stemmer, Andreas / Stemmer, Andreas  
Anmerkungen
Published online 4 May 2004.
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156 Zitate in Web of Science
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