Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
dc.contributor.author
Lemberger, M.
dc.contributor.author
Paskaleva, A.
dc.contributor.author
Zürcher, S.
dc.contributor.author
Bauer, A.J.
dc.contributor.author
Frey, L.
dc.contributor.author
Ryssel, H.
dc.date.accessioned
2017-06-10T01:55:49Z
dc.date.available
2017-06-10T01:55:49Z
dc.date.issued
2004-04
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2004.01.010
dc.identifier.uri
http://hdl.handle.net/20.500.11850/50795
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
High-k dielectrics
dc.subject
MOCVD
dc.subject
Zirconium silicate
dc.title
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
dc.type
Journal Article
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
72
ethz.journal.issue
1-4
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
315
ethz.pages.end
320
ethz.notes
Available online 21 January 2004.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
ethz.date.deposited
2017-06-10T01:56:10Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f5ab6d3750312
ethz.ecitpid
pub:82909
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-19T01:41:27Z
ethz.rosetta.lastUpdated
2021-02-14T08:57:19Z
ethz.rosetta.versionExported
true
ethz.COinS
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Journal Article [114934]