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dc.contributor.author
Lemberger, M.
dc.contributor.author
Paskaleva, A.
dc.contributor.author
Zürcher, S.
dc.contributor.author
Bauer, A.J.
dc.contributor.author
Frey, L.
dc.contributor.author
Ryssel, H.
dc.date.accessioned
2017-06-10T01:55:49Z
dc.date.available
2017-06-10T01:55:49Z
dc.date.issued
2004-04
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2004.01.010
dc.identifier.uri
http://hdl.handle.net/20.500.11850/50795
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
High-k dielectrics
dc.subject
MOCVD
dc.subject
Zirconium silicate
dc.title
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
dc.type
Journal Article
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
72
ethz.journal.issue
1-4
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
315
ethz.pages.end
320
ethz.notes
Available online 21 January 2004.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
ethz.date.deposited
2017-06-10T01:56:10Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f5ab6d3750312
ethz.ecitpid
pub:82909
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-19T01:41:27Z
ethz.rosetta.lastUpdated
2021-02-14T08:57:19Z
ethz.rosetta.versionExported
true
ethz.COinS
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