Pulse laser acoustics for the characterization of inhomogeneities at interfaces of microstructures

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Author
Vollmann, Jacqueline
Profunser, Dieter M.
Meier, Andreas H.
Döbeli, Max
Dual, Jürg
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Date
2004-04
Type
  • Conference Paper
Publication status
published
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Journal / series
Ultrasonics
Volume
42(1-9)
Pages
657 - 663
Publisher
Elsevier Science
Event
Ultrasonics International 2003 Meetng, Granada, Spain, June 30 - July 03, 2003
Subject
Functionally graded material (FGM); Diffusion; Laser acoustics; MEMS inspection; Wave propagation; In-depth profiling
Organisational unit
03307 - Dual, Jürg
Notes
Published online 1 February 2004.
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Citations
Cited 8 times in Web of Science
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