Pulse laser acoustics for the characterization of inhomogeneities at interfaces of microstructures

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Autor(in)
Vollmann, Jacqueline
Profunser, Dieter M.
Meier, Andreas H.
Döbeli, Max
Dual, Jürg
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Datum
2004-04
Typ
    Conference Paper
Publikationsstatus
published
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Zeitschrift / Serie
Ultrasonics
Band
42(1-9)
Seiten / Artikelnummer
657 - 663
Verlag
Elsevier
Konferenz
Ultrasonics International 2003 Meetng, Granada, Spain, June 30 - July 03, 2003
Thema
Functionally graded material (FGM); Diffusion; Laser acoustics; MEMS inspection; Wave propagation; In-depth profiling
Organisationseinheit
03307 - Dual, Jürg (emeritus) / Dual, Jürg (emeritus)  
Anmerkungen
Published online 1 February 2004.
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