Accuracy of scanning capacitance microscopy for the delineation of electrical junctions
Metadata only
Author
Stangoni, Maria
Ciappa, Mauro
Fichtner, Wolfgang
Date
2004-01Type
- Journal Article
Publication status
publishedJournal / series
Journal of Vacuum Science & Technology BVolume
Pages / Article No.
Publisher
American Institute of PhysicsNotes
Published online 4 February 2004.More
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