Accuracy of scanning capacitance microscopy for the delineation of electrical junctions
Metadata only
Date
2004-01Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaVolume
Pages / Article No.
Publisher
American Institute of PhysicsNotes
Published online 4 February 2004.More
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