Accuracy of scanning capacitance microscopy for the delineation of electrical junctions - Research Collection

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Author

Stangoni, Maria

Ciappa, Mauro

Fichtner, Wolfgang

Date

2004-01

Type

Journal Article

Citations

Cited 12 times in Web of Science

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Publication status

published

External links

https://doi.org/10.1116/1.1642646

Journal / series

Journal of Vacuum Science & Technology B

Volume

22(1)

Pages

406 - 410

Publisher

American Institute of Physics

Notes

Published online 4 February 2004.

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Citations

Cited 12 times in Web of Science

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