Accuracy of scanning capacitance microscopy for the delineation of electrical junctions
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Date
2004-01Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaVolume
Pages / Article No.
Publisher
American Institute of PhysicsNotes
Published online 4 February 2004.More
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ETH Bibliography
yes
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