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dc.contributor.author
Stangoni, Maria
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-10T02:02:18Z
dc.date.available
2017-06-10T02:02:18Z
dc.date.issued
2004-01
dc.identifier.issn
1071-1023
dc.identifier.issn
0734-211X
dc.identifier.issn
2166-2746
dc.identifier.issn
2166-2754
dc.identifier.other
10.1116/1.1642646
dc.identifier.uri
http://hdl.handle.net/20.500.11850/51101
dc.language.iso
en
dc.publisher
American Institute of Physics
dc.title
Accuracy of scanning capacitance microscopy for the delineation of electrical junctions
dc.type
Journal Article
ethz.journal.title
Journal of Vacuum Science & Technology B
ethz.journal.volume
22
ethz.journal.issue
1
ethz.pages.start
406
ethz.pages.end
410
ethz.notes
Published online 4 February 2004.
ethz.identifier.wos
ethz.identifier.nebis
000604586
ethz.publication.place
Melville, NY
ethz.publication.status
published
ethz.date.deposited
2017-06-10T02:02:33Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f6184e9998200
ethz.ecitpid
pub:83337
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T16:10:39Z
ethz.rosetta.lastUpdated
2018-08-02T09:53:30Z
ethz.rosetta.versionExported
true
ethz.COinS
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