Laser-produced plasma light source for extreme-ultraviolet lithography applications

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Author

Date

2012-04

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

11(2)

Pages / Article No.

021114

Publisher

SPIE

Organisational unit

03548 - Abhari, Reza S. / Abhari, Reza S.

Notes

Received 8 August 2011, Accepted 12 January 2012, Published online 11 June 2012.

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ETH Bibliography

yes

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