Digital MOS-transistor-based microhotplate array for simultaneous detection of enviromentally relevant gases

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Author
Graf, Markus
Taschini, Stefano
Käser, Philipp
Hagleitner, Christoph
Hierlemann, Andreas
Baltes, Henry
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Date
2004
Type
  • Conference Paper
Publication status
published
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Book title
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
351 - 354
Publisher
IEEE Service Center
Event
17th IEEE International Conference on Micro Electro Mechanical Systems, Maastricht, Netherlands, January 25-29, 2004
Organisational unit
03684 - Hierlemann, Andreas
Notes
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