Digital MOS-transistor-based microhotplate array for simultaneous detection of enviromentally relevant gases
Publikationsstatus
publishedExterne Links
Buchtitel
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)Seiten / Artikelnummer
Verlag
IEEE Service CenterKonferenz
Organisationseinheit
03684 - Hierlemann, Andreas / Hierlemann, Andreas