Influence of etching parameters on the redeposition in lithium niobate thin film circuits

Metadata only

Author

Date

2021

Type

Other Conference Item

ETH Bibliography

yes

Altmetrics

Publication status

published

Book title

Nanofab POM abstract book

Pages / Article No.

33 - 33

Publisher

Nanofab-net

Event

Nanofab Photonics Online Meetup, Online, May 16-18, 2021

Organisational unit

09531 - Grange, Rachel / Grange, Rachel

Related publications and datasets

Notes

Poster abstract ; Poster presented on May 17, 2021

More

ETH Bibliography

yes

Altmetrics

Research Collection