Localized and CMOS compatible growth of carbon nanotubes on a 3 × 3 μm2 microheater spot

Metadata only

Author

Date

2005-07

Type

Conference Paper

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

Book title

Digest of technical papers

Volume

1

Pages / Article No.

93 - 96

Publisher

IEEE

Event

13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’05), Seoul, South Korea, June 5-9, 2005

Subject

Process integration; Localized growth; Carbon nanotubes; Nanosystems

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer

Notes

Date of Current Version 22 august 2005.

More

ETH Bibliography

yes

Altmetrics

Research Collection