A new procedure to define the zero-field condition and to delineate pn-junctions in silicon devices by Scanning Capacitance Microscopy - Research Collection

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Author

Stangoni, Maria

Ciappa, Mauro

Fichtner, Wolfgang

Date

2003-09

Type

Journal Article

Citations

Cited 4 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/S0026-2714(03)00293-2

Journal / series

Microelectronics Reliability

Volume

43(9-11)

Pages / Article No.

1651 - 1656

Publisher

Elsevier

Organisational unit

03228 - Fichtner, Wolfgang

Notes

.

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Citations

Cited 4 times in Scopus

ETH Bibliography

yes

Altmetrics