A new procedure to define the zero-field condition and to delineate pn-junctions in silicon devices by Scanning Capacitance Microscopy

Thumbnail
Metadata only
Author
Stangoni, Maria
Ciappa, Mauro
Fichtner, Wolfgang
Date
2003-09
Type
  • Journal Article
Publication status
published
External links
Search via SFX
Journal / series
Microelectronics Reliability
Volume
43(9-11)
Pages / Article No.
1651 - 1656
Publisher
Elsevier
Organisational unit
03228 - Fichtner, Wolfgang  
Notes
.
More
Show all metadata
ETH Bibliography
yes
Altmetrics