A new procedure to define the zero-field condition and to delineate pn-junctions in silicon devices by Scanning Capacitance Microscopy
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Date
2003-09Type
- Journal Article
Publication status
publishedJournal / series
Microelectronics ReliabilityVolume
Pages / Article No.
Publisher
ElsevierOrganisational unit
03228 - Fichtner, Wolfgang
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