A new procedure to define the zero-field condition and to delineate pn-junctions in silicon devices by Scanning Capacitance Microscopy
Metadata only
Datum
2003-09Typ
- Journal Article
Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Microelectronics ReliabilityBand
Seiten / Artikelnummer
Verlag
ElsevierOrganisationseinheit
03228 - Fichtner, Wolfgang