A new procedure to define the zero-field condition and to delineate pn-junctions in silicon devices by Scanning Capacitance Microscopy
dc.contributor.author
Stangoni, Maria
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-10T07:20:06Z
dc.date.available
2017-06-10T07:20:06Z
dc.date.issued
2003-09
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/S0026-2714(03)00293-2
dc.identifier.uri
http://hdl.handle.net/20.500.11850/53586
dc.language.iso
en
dc.publisher
Elsevier
dc.title
A new procedure to define the zero-field condition and to delineate pn-junctions in silicon devices by Scanning Capacitance Microscopy
dc.type
Journal Article
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
43
ethz.journal.issue
9-11
ethz.journal.abbreviated
Microelectron. Reliab.
ethz.pages.start
1651
ethz.pages.end
1656
ethz.identifier.wos
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington, Oxford
ethz.publication.status
published
ethz.leitzahl
03228 - Fichtner, Wolfgang
ethz.leitzahl.certified
03228 - Fichtner, Wolfgang
ethz.date.deposited
2017-06-10T07:21:21Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f97ccc7f29029
ethz.ecitpid
pub:86730
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T05:42:23Z
ethz.rosetta.lastUpdated
2023-02-06T11:26:56Z
ethz.rosetta.versionExported
true
ethz.COinS
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