MEMS and NEMS

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Author
Hierold, Christopher
Date
2005
Type
  • Conference Paper
Publication status
published
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Editor
Riedling, Karl
Book title
GMe Forum 2005 : Proceedings of the Seminar at the Vienna University Of Technology
Pages / Article No.
5 - 11
Publisher
Gesellschaft für Mikro- und Nanoelektronik (GMe)
Event
GMe Forum 2005, March 17-18, 2005
Subject
Microsystem; MEMS; Nanosystem; Carbon nano tube; Sensor
Organisational unit
03609 - Hierold, Christofer  
Notes
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