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dc.contributor.author
Hierold, Christofer
dc.contributor.editor
Riedling, Karl
dc.date.accessioned
2019-10-24T14:17:03Z
dc.date.available
2017-06-10T07:49:13Z
dc.date.available
2019-10-24T14:17:03Z
dc.date.issued
2005
dc.identifier.isbn
3-901578-15-3
en_US
dc.identifier.isbn
978-3-901578-15-1
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54230
dc.language.iso
en
en_US
dc.publisher
Gesellschaft für Mikro- und Nanoelektronik (GMe)
en_US
dc.subject
Microsystem
en_US
dc.subject
MEMS
en_US
dc.subject
Nanosystem
en_US
dc.subject
Carbon nano tube
en_US
dc.subject
Sensor
en_US
dc.title
MEMS and NEMS
en_US
dc.type
Conference Paper
ethz.book.title
GMe Forum 2005 : Proceedings of the Seminar at the Vienna University Of Technology
en_US
ethz.pages.start
5
en_US
ethz.pages.end
11
en_US
ethz.event
GMe Forum 2005
en_US
ethz.event.location
Vienna, Austria
en_US
ethz.event.date
March 17-18, 2005
en_US
ethz.publication.place
Wien
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-10T07:51:31Z
ethz.source
ECIT
ethz.identifier.importid
imp59364fa50c0a129356
ethz.ecitpid
pub:87560
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-07-14T12:59:56Z
ethz.rosetta.lastUpdated
2019-10-24T14:17:13Z
ethz.rosetta.exportRequired
false
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=MEMS%20and%20NEMS&rft.date=2005&rft.spage=5&rft.epage=11&rft.au=Hierold,%20Christofer&rft.isbn=3-901578-15-3&978-3-901578-15-1&rft.genre=proceeding&rft.btitle=GMe%20Forum%202005%20:%20Proceedings%20of%20the%20Seminar%20at%20the%20Vienna%20University%20Of%20Technology
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