Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
Metadata only
Date
2003-08Type
- Journal Article
Publication status
publishedJournal / series
Microelectronics ReliabilityVolume
Pages / Article No.
Publisher
ElsevierNotes
Received 9 January 2003, Revised 20 February 2003, Available online 17 July 2003.More
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