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dc.contributor.author
Paskaleva, Albena
dc.contributor.author
Lemberger, Martin
dc.contributor.author
Zürcher, Stefan
dc.contributor.author
Bauer, Anton J.
dc.contributor.author
Frey, Lothar
dc.contributor.author
Ryssel, Heiner
dc.date.accessioned
2017-06-10T08:00:16Z
dc.date.available
2017-06-10T08:00:16Z
dc.date.issued
2003-08
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/S0026-2714(03)00180-X
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54447
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
dc.type
Journal Article
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
43
ethz.journal.issue
8
ethz.journal.abbreviated
Microelectron. reliab.
ethz.pages.start
1253
ethz.pages.end
1257
ethz.notes
Received 9 January 2003, Revised 20 February 2003, Available online 17 July 2003.
ethz.identifier.wos
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington, Oxford
ethz.publication.status
published
ethz.date.deposited
2017-06-10T08:02:04Z
ethz.source
ECIT
ethz.identifier.importid
imp59364fa95d56277820
ethz.ecitpid
pub:87889
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T12:58:28Z
ethz.rosetta.lastUpdated
2017-07-20T12:58:28Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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