Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds
dc.contributor.author
Vancura, C.
dc.contributor.author
Ruegg, M.
dc.contributor.author
Li, Y.
dc.contributor.author
Lange, D.
dc.contributor.author
Hagleitner, C.
dc.contributor.author
Brand, O.
dc.contributor.author
Hierlemann, A.
dc.contributor.author
Baltes, H.
dc.date.accessioned
2017-06-10T08:03:37Z
dc.date.available
2017-06-10T08:03:37Z
dc.date.issued
2003
dc.identifier.isbn
0-7803-7731-1
dc.identifier.other
10.1109/SENSOR.2003.1217025
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54509
dc.language.iso
en
dc.publisher
IEEE
dc.title
Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds
dc.type
Conference Paper
ethz.book.title
Digest of technical papers / Transducers’03 Boston
ethz.pages.start
1355
ethz.pages.end
1358
ethz.event
12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03)
ethz.event.location
Boston, MA, USA
ethz.event.date
June 8-12, 2003
ethz.notes
Published online 4 August 2003.
ethz.identifier.wos
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-10T08:06:41Z
ethz.source
ECIT
ethz.identifier.importid
imp59364faaa784e92950
ethz.ecitpid
pub:87951
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T16:44:46Z
ethz.rosetta.lastUpdated
2024-02-01T19:11:07Z
ethz.rosetta.versionExported
true
ethz.COinS
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