Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries

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Author
Heule, Martin
Gauckler, L. J.
Date
2003-08
Type
  • Journal Article
Publication status
published
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Journal / series
Sensors and Actuators B: Chemical
Volume
93(1-3)
Pages / Article No.
100 - 106
Publisher
Elsevier
Subject
Tin oxide; Gas sensors; Miniaturised gas sensor array; Microhotplates; Soft lithography; Micromolding in capillaries; Low energy consumption
Notes
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