Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries

Thumbnail
Metadata only
Author
Heule, Martin
Gauckler, L. J.
Date
2003-08
Type
  • Journal Article
Publication status
published
External links
Full text via SFX
Journal / series
Sensors and actuators B
Volume
93(1-3)
Pages
100 - 106
Publisher
Elsevier
Subject
Tin oxide; Gas sensors; Miniaturised gas sensor array; Microhotplates; Soft lithography; Micromolding in capillaries; Low energy consumption
Notes
.
More
Show all metadata
Altmetrics