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dc.contributor.author
Lemberger, M.
dc.contributor.author
Paskaleva, A.
dc.contributor.author
Zürcher, S.
dc.contributor.author
Bauer, A. J.
dc.contributor.author
Frey, L.
dc.contributor.author
Ryssel, H.
dc.date.accessioned
2017-06-10T08:16:18Z
dc.date.available
2017-06-10T08:16:18Z
dc.date.issued
2003-07
dc.identifier.issn
0022-3093
dc.identifier.issn
1873-4812
dc.identifier.other
10.1016/S0022-3093(03)00195-9
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54794
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Zirconium silicate films obtained from novel MOCVD precursors
dc.type
Journal Article
ethz.journal.title
Journal of Non-Crystalline Solids
ethz.journal.volume
322
ethz.journal.issue
1-3
ethz.journal.abbreviated
J. non-cryst. solids
ethz.pages.start
147
ethz.pages.end
153
ethz.notes
.
ethz.identifier.wos
ethz.identifier.nebis
000049437
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-10T08:16:33Z
ethz.source
ECIT
ethz.identifier.importid
imp59364fb09f96d95383
ethz.ecitpid
pub:88365
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T11:44:24Z
ethz.rosetta.lastUpdated
2018-12-02T05:43:19Z
ethz.rosetta.versionExported
true
ethz.COinS
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