Microfabrication of X-ray gratings: towards non conventional profile control in high aspect ratio structures

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Embargoed until 2023-06-10
Author
Shi, Zhitian
Date
2022
Type
    Doctoral Thesis
Permanent link
https://doi.org/10.3929/ethz-b-000548839
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Stampanoni, Marco
Examiner: Vogt, Ulrich
Examiner: Romano, Luciacc
Publisher
ETH Zurich
Organisational unit
03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
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