Microfabrication of X-ray gratings: towards non conventional profile control in high aspect ratio structures

Embargoed until 2023-06-10
Author
Date
2022Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-b-000548839Publication status
publishedExternal links
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Publisher
ETH ZurichOrganisational unit
03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
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ETH Bibliography
yes
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