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dc.contributor.author
Drechsler, U.
dc.contributor.author
Burer, N.
dc.contributor.author
Despont, M.
dc.contributor.author
Durig, U.
dc.contributor.author
Gotsmann, B.
dc.contributor.author
Robin, F.
dc.contributor.author
Vettiger, P.
dc.date.accessioned
2017-06-10T08:24:15Z
dc.date.available
2017-06-10T08:24:15Z
dc.date.issued
2003-06
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/S0167-9317(03)00095-9
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54990
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Cantilevers with nano-heaters for thermomechanical storage application
dc.type
Other Conference Item
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
67-8
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
397
ethz.pages.end
404
ethz.event
28th International Conference on Micro- and Nano-Engineering
ethz.event.location
Lugano, Switzerland
ethz.event.date
16-19 September, 2002
ethz.notes
.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-10T08:24:32Z
ethz.source
ECIT
ethz.identifier.importid
imp59364fb47fa9246524
ethz.ecitpid
pub:88670
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T08:13:24Z
ethz.rosetta.lastUpdated
2018-08-02T10:25:56Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Cantilevers%20with%20nano-heaters%20for%20thermomechanical%20storage%20application&rft.jtitle=Microelectronic%20Engineering&rft.date=2003-06&rft.volume=67-8&rft.spage=397&rft.epage=404&rft.issn=0167-9317&1873-5568&rft.au=Drechsler,%20U.&Burer,%20N.&Despont,%20M.&Durig,%20U.&Gotsmann,%20B.&rft.genre=unknown&
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