Large area crystallization of amorphous Si with overlapping high repetition rate laser pulses
- Journal Article
Journal / seriesThin Solid Films
Pages / Article No.
SubjectThin films; Silicon; Laser crystallization; Lateral growth; Large area annealing; Atomic force microscopy
Organisational unit03462 - Poulikakos, Dimos / Poulikakos, Dimos
NotesReceived 2 October 2011, Revised 15 July 2012, Accepted 16 July 2012, Published online 22 July 2012.
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