Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography

Metadata only

Autor(in)

Datum

2012-08

Typ

Journal Article

ETH Bibliographie

yes

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Publikationsstatus

published

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Zeitschrift / Serie

Applied Physics Letters

Band

101(9)

Seiten / Artikelnummer

093104

Verlag

American Institute of Physics

Organisationseinheit

03661 - Löffler, Jörg F. / Löffler, Jörg F.

Anmerkungen

Received 5 July 2012, Accepted 14 August 2012, Published online 27 August 2012.

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yes

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