- Conference Paper
A novel monolithic gas sensing system is presented, which includes a microhotplate and advanced analog and digital circuitry for sensor control, signal readout and communication. An innovative design of a circular-shape microhotplate has been implemented and was optimized for use with a thick film of nanocrystalline tin dioxide as sensitive layer. Post-CMOS processing steps for an electrode metalization on wafer level were developed. The integrated circuitry consists of a programmable digital temperature controller, a logarithmic converter for the sensor signal, an on-chip temperature sensor, and a standard serial interface. The detection of less than 1ppm CO has been achieved with this system in gas test measurements. Show more
Book titleProceedings of the Sixteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS-03)
Pages / Article No.
Organisational unit03684 - Hierlemann, Andreas / Hierlemann, Andreas
MoreShow all metadata