Field stitching in thermal probe lithography by means of surface roughness correlation
- Journal Article
Journal / seriesNanotechnology
Pages / Article No.
PublisherInstitute of Physics
Subjectelectron-beam lithography; spatial-phase locking
Organisational unit03389 - Spencer, Nicholas
NotesReceived 8 June 2012, In final form 25 July 2012, Published 5 September 2012.
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