Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms
Homan, Otte J.
- Journal Article
Journal / seriesIEEE Transactions on Evolutionary Computation
Pages / Article No.
SubjectElectron-beam lithography; Genetic algorithm; Optimization; Simplex-downhill algorithm; Simulation
NotesManuscript received 2 July 2001, Revised 29 January 2002.
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