Show simple item record

dc.contributor.author
Yao, Xiang
dc.contributor.author
Schneider, Christof W.
dc.contributor.author
Wokaun, Alexander
dc.contributor.author
Lippert, Thomas
dc.date.accessioned
2022-09-20T08:36:37Z
dc.date.available
2022-09-14T03:31:38Z
dc.date.available
2022-09-20T08:36:37Z
dc.date.issued
2022-07-02
dc.identifier.issn
1996-1944
dc.identifier.other
10.3390/ma15144862
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/570476
dc.identifier.doi
10.3929/ethz-b-000570476
dc.description.abstract
The gas-phase reaction dynamics and kinetics in a laser induced plasma are very much dependent on the interactions of the evaporated target material and the background gas. For metal (M) and metal–oxygen (MO) species ablated in an Ar and O2 background, the expansion dynamics in O2 are similar to the expansion dynamics in Ar for M+ ions with an MO+ dissociation energy smaller than O2. This is different for metal ions with an MO+ dissociation energy larger than for O2. This study shows that the plume expansion in O2 differentiates itself from the expansion in Ar due to the formation of MO+ species. It also shows that at a high oxygen background pressure, the preferred kinetic energy range to form MO species as a result of chemical reactions in an expanding plasma, is up to 5 eV.
en_US
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
MDPI
en_US
dc.rights.uri
http://creativecommons.org/licenses/by/4.0/
dc.subject
Pulsed laser ablation
en_US
dc.subject
thin film growth
en_US
dc.subject
plasma species dynamic
en_US
dc.subject
energy-resolved mass spectroscopy
en_US
dc.title
New Insight into the Gas Phase Reaction Dynamics in Pulsed Laser Deposition of Multi-Elemental Oxides
en_US
dc.type
Journal Article
dc.rights.license
Creative Commons Attribution 4.0 International
dc.date.published
2022-07-12
ethz.journal.title
Materials
ethz.journal.volume
15
en_US
ethz.journal.issue
14
en_US
ethz.pages.start
4862
en_US
ethz.size
13 p.
en_US
ethz.version.deposit
publishedVersion
en_US
ethz.identifier.scopus
ethz.publication.place
Basel
en_US
ethz.publication.status
published
en_US
ethz.date.deposited
2022-09-14T03:31:47Z
ethz.source
SCOPUS
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2022-09-20T08:36:45Z
ethz.rosetta.lastUpdated
2023-02-07T06:25:58Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=New%20Insight%20into%20the%20Gas%20Phase%20Reaction%20Dynamics%20in%20Pulsed%20Laser%20Deposition%20of%20Multi-Elemental%20Oxides&rft.jtitle=Materials&rft.date=2022-07-02&rft.volume=15&rft.issue=14&rft.spage=4862&rft.issn=1996-1944&rft.au=Yao,%20Xiang&Schneider,%20Christof%20W.&Wokaun,%20Alexander&Lippert,%20Thomas&rft.genre=article&rft_id=info:doi/10.3390/ma15144862&
 Search print copy at ETH Library

Files in this item

Thumbnail

Publication type

Show simple item record