Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators - Research Collection

Metadata only

Author

Hagleitner, Christoph

Herzog, Christian

Date

2003-01

Type

Conference Paper

Citations

Cited 36 times in Web of Science

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

https://doi.org/10.1016/S0924-4247(02)00307-2

Journal / series

Sensors and Actuators A: Physical

Volume

103(1-2)

Pages / Article No.

150 - 155

Publisher

Elsevier Science

Event

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, USA, January 20-24, 2002

Subject

Electromechanic actuation; Transistor sensing; Micromechanical resonators

More

Show all metadata

Citations

Cited 36 times in Web of Science

ETH Bibliography

yes

Altmetrics