Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators - Research Collection

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Author

Lange, Dirk

Hagleitner, Christoph

Herzog, Christian

Brand, Oliver

Baltes, Henry

Date

2003-01

Type

Conference Paper

Citations

Cited 30 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/S0924-4247(02)00307-2

Journal / series

Sensors and Actuators. A, Physical

Volume

103(1-2)

Pages / Article No.

150 - 155

Publisher

Elsevier Science

Event

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, USA, January 20-24, 2002

Subject

Electromechanic actuation; Transistor sensing; Micromechanical resonators

Notes

.

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Citations

Cited 30 times in Web of Science

ETH Bibliography

yes

Altmetrics