Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators
Metadata only
Date
2003-01Type
- Conference Paper
Publication status
publishedExternal links
Journal / series
Sensors and Actuators A: PhysicalVolume
Pages / Article No.
Publisher
Elsevier ScienceEvent
Subject
Electromechanic actuation; Transistor sensing; Micromechanical resonatorsMore
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