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dc.contributor.author
Liebrich, Thomas
dc.contributor.author
Knapp, Wolfgang
dc.date.accessioned
2017-08-21T09:49:25Z
dc.date.available
2017-06-10T10:10:11Z
dc.date.available
2017-08-21T09:49:25Z
dc.date.issued
2012
dc.identifier.uri
http://hdl.handle.net/20.500.11850/57285
dc.identifier.doi
10.3929/ethz-a-007563138
dc.description.abstract
The improvements and their experimental validation of a 3D-probing system for tactile dimensional metrology, introduced in 2010, are presented. The Fizeau interferometer is replaced by capacitive sensors, which enable a resolution at the probing sphere smaller than 100 nm. The results of a 2D-testing are also discussed. The simulated isotropic stiffness at the probing sphere is 84±25 N/m. The experimental stiffness is checked by force measurements and is determined to be 78±26 N/m. Requirements in design, manufacture, assembly and simulation to achieve this conformance between measured and simulated stiffness are presented.
en_US
dc.format
application/pdf
dc.language.iso
en
en_US
dc.publisher
Eidgenössische Technische Hochschule Zürich, Institute of Machine Tools and Manufacturing (IWF)
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
FEINMECHANIK (MASCHINENBAU)
en_US
dc.subject
FORMMESSUNG + PROFILMESSUNG (MECHANIK)
en_US
dc.subject
MICROMACHINE (MECHANICAL ENGINEERING)
en_US
dc.subject
MEASUREMENT OF SHAPES AND PROFILES (MECHANICS)
en_US
dc.subject
Sensor
en_US
dc.subject
MESSUNG VON DICKEN + DURCHMESSERN + HÖHEN + TIEFEN + NEIGUNGEN (MECHANIK)
en_US
dc.subject
Metrology
en_US
dc.subject
PRECISION MECHANISMS AND INSTRUMENTS (MECHANICAL ENGINEERING)
en_US
dc.subject
Development
en_US
dc.subject
MIKROMECHANIK (MASCHINENBAU)
en_US
dc.subject
MEASUREMENT OF THICKNESS + DIAMETER + HEIGHT + DEPTH + INCLINATION (MECHANICS)
en_US
dc.title
Improvements and experimental validation of a 3D-probi ng system for micro-components
en_US
dc.type
Report
dc.rights.license
In Copyright - Non-Commercial Use Permitted
dc.date.published
2012
ethz.size
5 p.
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::620 - Engineering & allied operations
en_US
ethz.identifier.nebis
007563138
ethz.publication.place
Zürich
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing::03641 - Wegener, Konrad (emeritus) / Wegener, Konrad (emeritus)
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing::03641 - Wegener, Konrad (emeritus) / Wegener, Konrad (emeritus)
ethz.date.deposited
2017-06-10T10:10:43Z
ethz.source
ECOL
ethz.source
ECIT
ethz.identifier.importid
imp59364fe46e95771093
ethz.identifier.importid
imp59366b2ed6f0f30993
ethz.ecolpid
eth:6099
ethz.ecitpid
pub:91691
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2017-07-26T14:59:48Z
ethz.rosetta.lastUpdated
2024-02-02T02:20:52Z
ethz.rosetta.versionExported
true
ethz.COinS
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