Characterization of Aerodynamic Effects and Unbalance in Rotor Dynamics Whirl Orbit

Abstract

Mobility and artificial intelligence are the key drivers for the semiconductor industry. The requirements for high-performance chips are constantly increasing and technologies, such as ultra-precision machining, are necessary for this value chain of manufacturing. The exact bearing of rotating axes is one of the main tasks to produce precision workpieces. The influences that prevent these axes from perfect rotation originate from unbalance, gravity, dynamic elasticities of air in the bearing, and process forces. This paper aims to characterize these disturbances according to their origin and to describe the motion error. In this way, Moore's law can go on in chip manufacturing.