MicroFabrication of flow field channels in glassy carbon by a combined laser and reactive ion etching process

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Author
Kuhnke, M.
Lippert, Thomas
Scherer, G.G.
Wokaun, Alexander
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Date
2005-10
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Surface & coatings technology
Volume
200(1-4)
Pages / Article No.
730 - 733
Publisher
Elsevier
Event
9th International Conference on Plasma Surface Engineering (PSE 2004), Garmisch Partenkirchen, Germany, September 13-17, 2004
Subject
Glassy carbon; Micro fuel cell; Laser ablation; Metal film; Reactive ion etching
Organisational unit
02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
03421 - Wokaun, Alexander (emeritus)  
Notes
Available online 19 March 2005.
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Citations
Cited 24 times in Web of Science
Cited 23 times in Scopus
ETH Bibliography
yes
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