MicroFabrication of flow field channels in glassy carbon by a combined laser and reactive ion etching process

Thumbnail
Metadata only
Author
Kuhnke, M.
Lippert, Thomas
Scherer, G.G.
Wokaun, Alexander
Show all
Date
2005-10
Type
  • Conference Paper
Publication status
published
External links
Search via SFX
Journal / series
Surface & coatings technology
Volume
200(1-4)
Pages / Article No.
730 - 733
Publisher
Elsevier
Event
9th International Conference on Plasma Surface Engineering (PSE 2004), Garmisch Partenkirchen, Germany, September 13-17, 2004
Subject
Glassy carbon; Micro fuel cell; Laser ablation; Metal film; Reactive ion etching
Organisational unit
02513 - Laboratorium für Anorganische Chemie (LAC) / Laboratory of Inorganic Chemistry (LAC)
03421 - Wokaun, Alexander  
Notes
Available online 19 March 2005.
More
Show all metadata
Citations
Cited 23 times in Web of Science
Cited 21 times in Scopus
ETH Bibliography
yes
Altmetrics