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dc.contributor.author
Prochazka, Lukas
dc.contributor.supervisor
Hierold, Christofer
dc.contributor.supervisor
Rösgen, Thomas
dc.date.accessioned
2017-07-20T10:14:08Z
dc.date.available
2017-06-10T10:57:11Z
dc.date.available
2017-07-20T10:14:08Z
dc.date.issued
2011
dc.identifier.uri
http://hdl.handle.net/20.500.11850/58403
dc.identifier.doi
10.3929/ethz-a-006682813
dc.format
application/pdf
dc.language.iso
en
en_US
dc.publisher
ETH, Institute of Fluiddynamics ETH Zurich
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
WINDKANÄLE, TESTS, MODELLVERSUCHE (AERODYNAMIK)
en_US
dc.subject
MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)
en_US
dc.subject
OPTOELECTRONIC DEVICES + PHOTOELECTRONIC DEVICES (OPTOELECTRONICS)
en_US
dc.subject
PRESSURE MEASUREMENT + BAROMETERS + MANOMETERS (MECHANICS)
en_US
dc.subject
WIND TUNNELS, TESTING, MODEL STUDIES (AERODYNAMICS)
en_US
dc.subject
DRUCKMESSUNG + MANOMETER + MESSDOSEN + BAROMETER (MECHANIK)
en_US
dc.subject
OPTOELEKTRONISCHE BAUELEMENTE + PHOTOELEKTRONISCHE BAUELEMENTE (OPTOELEKTRONIK)
en_US
dc.subject
MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS)
en_US
dc.subject
MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK)
en_US
dc.subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
en_US
dc.title
Optically interrogated MEMS pressure sensor array
en_US
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
160 p.
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::621.3 - Electric engineering
en_US
ethz.code.ddc
DDC - DDC::5 - Science::530 - Physics
en_US
ethz.identifier.diss
19581
en_US
ethz.identifier.nebis
006682813
ethz.publication.place
Zürich
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02628 - Institut für Fluiddynamik / Institute of Fluid Dynamics::03479 - Rösgen, Thomas (emeritus) / Rösgen, Thomas (emeritus)
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02628 - Institut für Fluiddynamik / Institute of Fluid Dynamics::03479 - Rösgen, Thomas (emeritus) / Rösgen, Thomas (emeritus)
ethz.date.deposited
2017-06-10T10:58:01Z
ethz.source
ECOL
ethz.source
ECIT
ethz.identifier.importid
imp59366b0fa4a3766224
ethz.identifier.importid
imp59364ff9f2fde24779
ethz.ecolpid
eth:4592
ethz.ecitpid
pub:93389
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2017-07-20T10:14:17Z
ethz.rosetta.lastUpdated
2023-02-06T14:24:54Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Optically%20interrogated%20MEMS%20pressure%20sensor%20array&rft.date=2011&rft.au=Prochazka,%20Lukas&rft.genre=unknown&rft.btitle=Optically%20interrogated%20MEMS%20pressure%20sensor%20array
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