Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies
Illarionov, Alexey Yu
- Journal Article
Journal / seriesMicroelectronics Reliability
Pages / Article No.
Organisational unit03380 - Huang, Qiuting
NotesReceived 12 June 2012, Accepted 24 June 2012, Available online 18 July 2012.
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